Capable 4-8 Inch Wafer - SSM 42D Capacitance Measurement Unit - DC bias to +/- 250 volts - High voltage safety unit - Pulsed and ramped DC bias - Low ac voltage excitation(15mV) - Embeded micro processor control -Power condition unit -Pneumatic control Unit -System Controller -PROCAP software
SSM 495 Accessory Parts
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