KLA/Tencor RS-75 Resistivity Mapping System from Tech-Semi
Fully Refurbished , Meet OEM Specifications.
Analyze sheet resistance data, on various conductive layers such as implants, diffusion, epi, CVD, metals, and bulk substrates
- Provides accurate and repeatable sheet resistance measurements, from 5 m ohm/sq to 5M ohm/sq on 2-inch to 8-inch wafers, by uniting sophisticated modeling algorithms,advanced analysis techniques, and precision electronics.
- Optional 100mm - 200mm Open Cassette
- Cassette to cassette handling
- Measurement Range: 5mΩ/sq - 5MΩ/sq
- Repeatability (VLSI): < 0.2% (1σ)
- Accuracy (VLSI): ±1%
- Edge Exclusion: 3mm from edge of film
- Throughput (5-site): 100WPH
- Alignment System: Notch/Flat aligner on Probe Arm
- Computer OS: DOS Software: Rev 6.22