KLA/Tencor RS-75 Resistivity Mapping System

Tech-Semi

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Product Overview

KLA/Tencor RS-75 Resistivity Mapping System from Tech-Semi

Fully  Refurbished , Meet OEM Specifications.
Analyze sheet resistance data, on various conductive layers such as implants, diffusion, epi, CVD, metals, and bulk substrates

  • Provides accurate and repeatable sheet resistance measurements, from 5 m ohm/sq to 5M ohm/sq on 2-inch to 8-inch wafers, by uniting sophisticated modeling algorithms,advanced analysis techniques, and precision electronics.
  • Optional 100mm - 200mm Open Cassette
  • Cassette to cassette handling
  • Measurement Range: 5mΩ/sq - 5MΩ/sq
  • Repeatability (VLSI): < 0.2% (1σ)
  • Accuracy (VLSI): ±1%
  • Edge Exclusion: 3mm from edge of film
  • Throughput (5-site): 100WPH
  • Alignment System: Notch/Flat aligner on Probe Arm
  • Computer OS: DOS Software: Rev 6.22

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